6"晶圆高功率半导体激光芯片量产线
Volumemanufacturingofhigh-powerdiodelasersusing6"wafers
JunWanga,b*,ShaoyangTana,HengLiua,BoLia,YiwenHua,RunZhaoa,XiaoXiaoa,YangChenga,YintaoGuoa,WuZhaob,LichenZhangb,PeiMiaob,Lu’anGuoa,GuoliangDengb,HuomuYangb,HaoZhoub,HongZhangb,XinshengLiaoa
aSuzhouEverbrightPhotonicsCo.,Ltd.,Suzhou,P.R.China
bSichuanUniversity,Chengdu,P.R.China
王俊a,b*,谭少阳a,刘恒a,李波a,胡燚文a,赵润a,肖啸a,程洋a,郭银涛a,赵武b,张立晨b,苗霈b,郭路安a,邓国亮b,杨火木b,周昊b,张弘b,廖新胜a
a苏州长光华芯光电技术股份有限公司，苏州
b四川大学，成都
ProceedingsVolume,High-PowerDiodeLaserTechnologyXX;06()